FIELD EMISSION SCANNING ELECTRON MICROSCOPY (IT INCLUDES LITHOGRAPHY)


Dr. Mauricio Isaacs


















The field emission scanning electron microscopy (FESEM) of high resolution has ESEM technology through which conductive and non-conductive samples can be characterized with SE and MSE images (Back-scattered Detector). ESEM allows the analysis of conductive and non-conductive images and/ or hydrated samples, it minimizes the amount of the low vaccum sample preparation and the extended and variable low vaccum capacity until 650 Pa, making posible the observation of a wide variety of samples without the need of coating (non-destructive analysis).

SERVICES PROVIDED

  • SE and BSE Image recording in high vaccum, low vaccum and environmental mode ESEM.
  • STEM for the observation of samples in transmission mode
  • Dispersion of X-ray energies (EDX) Micro-analysis
  • Electron Beam Lithography (EBL)

PRICES

CIEN-UC, thanks to the relationship between faculties of Engineering, Physics and Chemistry; CIEN-UC has a variety of research pieces of equipment which allow the development of researches in different fields related to Nanotechnology and Materials Science. Engineering, Phisics and Chemistry.

Prices here.

To book hours please write an e-mail to fesemcien@uc.cl

or call to (569) 5504 1441.

LOCATION

Laboratorio CIENUC FESEM

EQUIPMENT IN LABS ASSOCIATED TO CIEN-UC

Some of the equipments

  • Oscilloscope
  • Power Supply unitsr
  • Multimeters
  • Semiconductors Probe Station
  • Semiconductors Parameters Analyzer
  • Vector Network Analyzer
  • Transmitted Light Petrographic Microscope (polarizing)
  • Scanning Electron Microscope (SEM) with High Resolution and SE, BSE, CL and EDS Detectors
  • 64 core capacity computer cluster
  • microAeth AE51 micro-aethalometer
  • Dustrack 8530II Particle Concentration Continuous Meter
  • MetOne Particulate Profiler 212-1
  • EspNano100 Electrostatic Sampler
  • Partisol2000i sampler(external)
  • TAS Sampler (internal)
  • Electron Beam Evaporator
  • Measurement System for Low Temperature Electricla Transport
  • Solar Simulator
  • UV-VIS-NIR Spectrometers and Lamps
  • Chemical Vapor Deposition Reactor (CVD)
  • RT66B-Radiant Tech Ferroelectric Circuit

 

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