Facilities / Equipments - Lo:k Lab

         Clean Bench (BioBase) class ISO 5 equipped with:

  • - Spincoater (Laurell)


  • - Hot plate


  • - Ultrasonic bath (Elma)


  • - Ultra pur nitrogen gun (0.22 um)


         Chemical hoods equipped with:

  • - DI water (10 Mohm.cm)


  • - Ultra pur nitrogen gun (0.22 um)


  • - Laboratory glassware


  • - Stirring hot plate


         Universal Oven UN-30 (Memmert) 

         Precision Weighing Balance (Kern) 

         Fridge for Solvents/chemicals 

         Chemical storage Cabinet 

         Metallurgical optical microscope with:

  • - Transmission/Reflexion


  • - Polarized Light


  • - 14 Mpx CCD camera


  • - Acquisition Computer


         Electrical Measurements setup including 

  • - High resolution 2 Channels Universal Source meter 3245A (Agilent)


  • - 3 Digital Multimeters K2000 (Keithley)


  • - Electrometer K6517A (Keithley)


  • - Nanovoltmeter (Keithley)


  • - high voltage power source (Agilent)


  • - Oscilloscope 100 MHz


  • - Optical cryostat 2- 400 K (Janis)


  • - Acquisition Computer with GPIB interfaces


  • - 1 Tesla Electromagnet


  • - 6675A power Supply (Agilent)


  • ...

         2 binocular microscopes 

         Vaccum pumps 

Available at PUC and/or CIENC-UC:

         30 kV Field Emission SEM with Lithography System  

  • - Environmental Chamber
  • - EDX detector
  • - E-beam Lithography System (Raith)
  • - Transmission

        PVD system (EWDARDS) 

        RF Plasma system (Ar, N2, O2) 

        Optical Lithography System OAI